Model SC 23 - Covered Chuck Spin Coater

DESCRIPTION:

The SC-23, equipped with a specially designed covered chuck system, is the optimal tool for uniform coatings. Turbulence-related non-uniformities such as streaks, comets, striations, and splatters are eliminated. The consumption of Liquid Film Chemicals is greatly reduced, with a 70% reduction demonstrated in some applications. Ideal for applications with square, rectangular, or other irregularly shaped substrates, the SC-23 will uniformly coat into corners with no discernable edge bead. The covered chuck system eliminates the need for nested chucks and its associated backside contamination and particulates. This coater's multiple options make it adaptable to various applications and budget requirements. The SC-23 is suited for Flat Panel Display, photomask, wafer, GaAs, leading edge MultiChip Module, advanced Printed Wire Board and PCB applications.

FEATURES:

• Substrate sizes from 12" x 12" to 16" x 16" square, or from 6" x 6" to 12" x 12" square
• Coating uniformity < ± 2.0%
• Spin speeds to 3000 RPM; Accelerations to 500 RPM/S
• Automation Ready with Substrate raising/lowering, chuck indexing and RS232 communications
• Microprocessor Controlled with 8 Process Programs: 5 preset and 3 custom, all 8 having programmable step parameters
  

OPTIONS:

• Manual, Semiautomatic, or Fully Automatic Substrate Handling
• Automated Dispense Arm
• Up to 3 Liquid Film Chemical Pumps with all Teflon delivery lines and contact surfaces
• Up to 2 Cleaning Solvent Dispense with all Teflon delivery lines and Stainless Steel Canister
• 0.2 µm Filtration for Photoresist and Solvent
• Nitrogen Blow Off with 0.01 mm filter and all Teflon delivery lines
• Stainless Steel, Nickel Plated, or Polypropylene Cabinet