- Automated Cassette-to-Cassette Double Sided Systems -

CCS 300S - Cassette-to-Cassette Cleaner - Single substrates to twelve inches (12") in diameter or seventeen inches (17") on the diagonal in the process chamber in an automated cassette-to-cassette system. With a full range of double sided cleaning capabilities in user defined configurations.

CCS 300M - Cassette-to-Cassette Cleaner - Multiple substrates of up to eight inches (8") in diameter simultaneously in process chamber, for high throughput, in an automated cassette-to-cassette system. With a full range of double sided cleaning capabilities in user defined configurations.