Model ILR 400 - In-Line CO2 Reionizer

DESCRIPTION:

The Model ILR400 In-Line DI Water reionizer System is based on the latest technological developments to eliminate
electrostatic charge and thereby the electrostatic damage, generated by the dicing and cleaning process of semiconductor devices. The ILR400 can supply Reionized DI Water to multiple saws and cleaners in combinations up to 4.0 gallons per minute in two versions: 0.5 to 2.0 GPM for low incremental and 1.5 - 4.0 GPM for high incremental flows.

FEATURES:

• Capacity of 4.0 GPM
• Continuous resistivity control from 0.02 Megohm to 2.0 Megohm.
• Compact system that can be located in clean rooms or service alleys.
• Special membrane to dissolve the CO2 gas in the DI water flow.
• Built-in pump to maintain the required pressure of the water.
• No water contamination (99.00% purity).
• Easy operation and maintenance.

OPTIONS:

• Keyed anti-tamper security cover.
• Dampener to suppress surge from cleaning system pumps.