Model CCS 300 - Cassette-to-Cassette Cleaning System

DESCRIPTION:

The Model CCS-300 Cleaning System provides for uniform application of High Pressure and/or Megasonic D.I.-H2O dispensed spray over the entire substrate surface and assurance of particulate removal in a fully automated cassette-to-cassette operation compatible with substrate to 300mm. The backside can be treated with optional either High Pressure or Low Pressure (house) D.I.-H2O dispensed spray, with N2 dry assist, for efficient one step double-sided cleaning. Plumbed for ultra clean application, the CCS-300 has all teflon lines and valves and no threaded fittings contacting the D.I.-H2O. A CO2 reionizing unit for High Pressure D.I.-H2O, is also available, to eliminate electrostatic discharge. Optional brushes, cylinder or rotating disk of PVA or 3 mil nylon, with surfactant dispense are available for this module for one step cleaning. Rapid acceleration and excellent exhaust along with N2 dry assist provide for short and thorough drying cycle. To thoroughly eliminate potential electrostatic buildup an N2 ionizer unit and antistatic materials are available. Heated D.I.-H2O and N2 are also available for cleaning enhancement and drying acceleration. The CCS 300 is SEMI S2-93 compliant.

FEATURES:

• Compatibility with various sized substrates to 300 mm on the diagonal/diameter.
• Spin motor, closed loop brushless DC with encoder feedback, having speed control of 1 to 5,000 RPM ±1 RPM and acceleration to 1,000 RPM/S.
• Dispense arm driven by Stepper motor.
• All Teflon valves and lines with no threaded fittings in contact with DI-H2O.
• Process chamber of stainless steel and exhausted, with full laminar flow, through a perforated bottom.
• N2 drying assist with 0.02 µm filtration.
• Class 1 compatible robotics configured with double end effector with vacuum hold, sensor and interlock designed for minimum surface contact.
• Integrated non-contact scanner for in-cassette mapping and detection of cross-slotted substrates.
• Two cassette stands.
• Built-in safety interlocks.
• Windows NTtm based PC/PLC control system with a graphical and touch-screen user interface.
• Stainless steel frame and skins.
• Chemical resistant transparent and shatter proof shields to 36" above working surface for safety and laminar flow control having interlocked access doors for easy maintenance.
• Programmable exhaust flow control

OPTIONS:

• Oscillating megasonic DI-H2O jet assembly.
• Brush assembly, cylinder or rotating disk type three (3) mil nylon bristles or PVA, with surfactant and DI-H2O dispenses.
• Oscillating low pressure surfactant dispense with suck-back capability.
• Oscillating High Pressure DI-H2O jet assembly, adjustable to 2000 PSI, having 0.2 m filtration.
• CO2 DI-H2O Re-ionizing Unit for elimination of static charge build-up in High Pressure DI-H2O.
• Dispense/brush arms with programable height adjustment.
• Chuck Assembly, positive grip, with interlock.
• Backside chuck Low Pressure DI-H2O jet rinse.
• Backside High Pressure DI-H2O jet assembly, having 0.2 micron point-of-use filtration.
• Programmable chamber rinse.
• Programmable diverted drain.
• Surfactant dispense canisters with level alert.
• Ionized N2 dispense for elimination of static charge build-up.
• Anti-static materials.
• N2 heater.
• DI-H2O heater.
• Substrate flip capability.
• Edge grip end effector.
• Better than Class 1 micro-environment.
• CE compliance.
• SMIF pod out cassette capability.
• Wet input cassette with or without megasonic capability.